Production equipment for microsystems - Tray - Dimensions and tolerances
Project begin
2008-12-09
Planned document number
DIN 32561
Abstract
This Standard applies to trays which take workpeaces orderly and which can be used for storage, transport and handling with standardized handling systems and production equipment of semiconductors.
This Standard specifies a uniform external design, dimensions and tolerances as well as the designation and the area for marking of those trays.
Responsible Committee
NA 027-03-03 AA Production equipment for microsystems
Notice of supersedure
Vorgesehen als Ersatz für DIN 32561:2003-09
Draft standard
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