Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 4: Specimen for optical procedures
Project begin
2011-09-29
Planned document number
DIN 32567-4
Abstract
This document specifies methods for optical topographic measurement of the layer thickness of layer systems, with different mechanical properties of layer and substrate, in order to determine systematic deviations of the measured layer thickness.
Responsible Committee
NA 027-03-03 AA Production equipment for microsystems